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International Symposium on “Mechanical Reliability of Silicon MEMS – Recent Progress and Further Requirements”
Halle (Saale), Germany, 27-28 Feb 06 60 experts and PATENT-DfMM delegates participated in this workshop to discuss progress and requirements of silicon MEMS reliability at the Fraunhofer Institute for Mechanics of Materials IWM. The key message from an industry panel discussion was that the providing proof of MEMS reliability is one of the key factors for a long-term market success. Furthermore, it was emphasized that recent research results from academic institutions on the factors affecting the reliability have to be transferred into industrial MEMS design methodologies. The need for standards was discussed as well. It was suggested to initiate a round robin aiming at the definition of standards for fatigue tests. It was also concluded that standardization of test interfaces and data evaluation are required for reliability testing, especially during production. Summary by Patric Salomon. The complete report (press release by Fraunhofer IWM) is available here. |