Design for Testability of MNS
Title:
Microsystems testing: an approach and open problems
Author(s):
Lubaszewski, M.; Cota, E.F.; Courtois, B.
Reference:
Design, Automation and Test in Europe, 1998., Proceedings, Vol., Iss., 23-26 Feb 1998, Pages:524-528
Title:
From microelectronics to MEMS testing
Author(s):
COURTOIS B., MIR S., CHARLOT B., LUBASZEWSKI M.
Reference:
Publ. in IEEE Microelectronics Reliability and Qualification Workshop, Glendale, California, USA, 1 November 2000 , IEEE, [Publ. Year] 2000
Title:
On-chip pseudorandom MEMS testing
Author(s):
RUFER L., MIR S., SIMEU E., DOMINGUES CH.
Reference:
Publ. in 9th International Mixed-Signal Testing Workshop (IMSTW’03), Sevilla, Spain, June 25-27 , [Publ. Year] 2003
Title:
On-chip testing of MEMS using pseudo-random test sequences
Author(s):
RUFER L., MIR S., SIMEU E., DOMINGUES CH.
Reference:
Publ. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP'03), Cannes, France, May 5-7 , SPIE, [Publ. Year] 2003
Title:
Generation of electrically induced stimuli for MEMS self-test
Author(s):
CHARLOT B., MIR S., PARRAIN F., COURTOIS B.
Reference:
in JETTA : Journal of Electronic Testing - Theory and Applications, Vol.17, No. 6, December , [Publ. Year] 2001
Title:
An integrated diagnostic reconfiguration (IDR) technique for fault tolerant mixed signal microsystems
Author(s):
Sharif, E.; Dorey, T.; Richardson, A.
Reference:
Electronics, Circuits and Systems, 1998 IEEE International Conference on, Vol.1, Iss., 1998, Pages:413-416 vol.1
Title:
On the use of an oscillation-based test methodology for CMOS micro-electro-mechanical systems
Author(s):
Beroulle, V.; Bertrand, Y.; Latorre, L.; Nouet, P.
Reference:
Design, Automation and Test in Europe Conference and Exhibition, 2002. Proceedings, Vol., Iss., 2002, Pages: 1120-
Title:
Evaluation of the oscillation-based test methodology for micro-electro-mechanical systems
Author(s):
Beroulle, V.; Bertrand, Y.; Latorre, L.; Nouet, P.
Reference:
VLSI Test Symposium, 2002. (VTS 2002). Proceedings 20th IEEE, Vol., Iss., 2002, Pages: 439- 444
Title:
Electrically induced stimuli for MEMS self-test
Author(s):
Charlot, B.; Mir, S.; Parrain, F.; Courtois, B.
Reference:
VLSI Test Symposium, 19th IEEE Proceedings on. VTS 2001, Vol., Iss., 2001, Pages:210-215
Title:
RF testing of MEMS components
Author(s):
Deakin, D.; DeNatale, J.; Higgins, J.; Mihailovich, R.; Park, S.; Pascal, M.; Richardson, P.; Pollock, G.; Sailer, A.; Sovero, E.; Studer, J.; Sullivan, G.; Tran, L.; Waldrop, J.; Wang, A.; Yao, J.; Anderson, G.; Erlandson, R.
Reference:
AUTOTESTCON '98. IEEE Systems Readiness Technology Conference., 1998 IEEE, Vol., Iss., 24-27 Aug 1998, Pages:163
Title:
Resonant accelerometer with self-test,
Author(s):
M. Aikele, K. Bauer, W. Ficker, F. Neubauer, U. Prechtel, J. Schalk and H. Seidel
Reference:
Sensors and Actuators A: Physical, Volume 92, Issues 1-3, 1 August 2001, Pages 161-
Title:
A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation
Author(s):
D. De Bruyker, A. Cozma and R. Puers
Reference:
Sensors and Actuators A: Physical, Volume 66, Issues 1-3, 1 April 1998, Pages 70-75
Title:
RASTA––real-acceleration-for-self-test accelerometer: a new concept for self-testing accelerometers
Author(s):
R. Puers and S. Reyntjens
Reference:
Sensors and Actuators A: Physical, Volumes 97-98, 1 April 2002, Pages 359-368
Title:
Airbag application: A microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability
Author(s):
L. Zimmermann, J. Ph. Ebersohl, F. Le Hung, J. P. Berry, F. Baillieu, P. Rey, B. Diem, S. Renard and P. Caillat
Reference:
Sensors and Actuators A: Physical, Volume 46, Issues 1-3, January-February 1995, Pages 190-195
Title:
Test Support Strategies for MEMS
Author(s):
R. Rosing, A. Richardson, A. Dorey & A. Peyton
Reference:
IEEE International Mixed Signal Test Workshop pp345-350, Whistler, June 11th - 15th 1999.
Title:
A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation
Author(s):
De Bruyker, D.; Cozma, A.; Puers, R.
Reference:
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on, Vol.2, Iss., 16-19 Jun 1997, Pages:1461-1464 vol.2
Title:
Challenges facing practical DFT for MEMS
Author(s):
Tewksbury, S.K.
Reference:
Defect and Fault Tolerance in VLSI Systems, 2001. Proceedings. 2001 IEEE International Symposium on, Vol., Iss., 2001, Pages:11-17
Title:
Testable design and testing of micro-electro-fluidic arrays
Author(s):
Kerkhoff, H.G.; Acar, M.
Reference:
VLSI Test Symposium, 2003. Proceedings. 21st, Vol., Iss., 27 April-1 May 2003, Pages: 403- 409
Title:
Testing of a microanalysis system
Author(s):
Kerkhoff, H.G.
Reference:
Instrumentation and Measurement, IEEE Transactions on, Vol.50, Iss.6, Dec 2001, Pages:1485-1489
Title:
Microsystem Testing: Challenge Or Common Knowledge
Author(s):
Kerkhoff, H.G.
Reference:
Test Symposium, 1998. ATS '98. Proceedings. Seventh Asian, Vol., Iss., 2-4 Dec 1998, Pages:510-511
Title:
MISSED: An environment for mixed-signal microsystem testing and diagnosis
Author(s):
Kerkhoff, H.G.; Docherty, G.
Reference:
Test Symposium, 1993., Proceedings of the Second Asian, Vol., Iss., 16-18 Nov 1993, Pages:88-93
Title:
Self-testable accelerometer systems
Author(s):
Allen, H.V.; Terry, S.C.; de Bruin, D.W.
Reference:
Micro Electro Mechanical Systems, 1989, Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'. IEEE, Vol., Iss., 20-22 Feb 1989, Pages:113-115
Title:
Second-order effects in self-testable accelerometers
Author(s):
de Bruin, D.W.; Allen, H.V.; Terry, S.C.
Reference:
Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE, Vol., Iss., 4-7 Jun 1990, Pages:149-152
Title:
MEMs Testing - A Case Study
Author(s):
V. Beroulle, Y. Bertrand, L. Latorre, P. Nouet
Reference:
LIRMM, University of Montpellier, France
Title:
Test Strategy for Testing High Performance Temperature Sensor Products
Author(s):
D. Walsh, J. Grubb
Reference:
Analog Devices, Limerick, Ireland
Title:
Adaptive control for the conventional mode of operation of MEMS gyroscopes
Author(s):
Sungsu Park; Horowitz, R.;
Reference:
Microelectromechanical Systems, Journal of ,Volume: 12 , Issue: 1 , Feb. 2003 , Pages:101 - 108
Title:
Designing for Test MEMs-based Systems
Author(s):
Jose Vicente Calvano, Vladimir Castr Alves, Marcelo Soares Lubaszewski
Reference:
IMSTW'03: 9th IEEE International Mixed-Signal Testing Workshop , 2003
Title:
Built-in self test of CMOS-MEMS accelerometers
Author(s):
Deb, N.; Blanton, R.D.
Reference:
Test Conference, 2002. Proceedings. International, Vol., Iss., 2002, Pages: 1075- 1084
Title:
MEMS Manufacturing Testing: An Accelerometer Case Study
Author(s):
Theresa Maudie, Alex Hardt, Rick Nielsen, Dennis Stanerson, Ron Bieschke, and Mike Miller
Reference:
Test Conference, 2003. Proceedings. International, Vol., Iss., 2003, Pages:843-849
Modeling of MNS
Title:
On the integration of design and test for chips embedding MEMS
Author(s):
Mir, S.; Charlot, B.
Reference:
Design & Test of Computers, IEEE, Vol.16, Iss.4, Oct-Dec 1999, Pages:28-38
Title:
Design and test of MEMS
Author(s):
Courtois, B.; Karam, J.M.; Mir, S.; Lubaszewski, M.; Szekely, V.; Rencz, M.; Hofmann, K.; Glesner, M.
Reference:
VLSI Design, 1999. Proceedings. Twelfth International Conference On, Vol., Iss., 7-10 Jan 1999, Pages:270-275
Title:
Applied design and analysis of microsystems
Author(s):
Karam, J.M.; Courtois, B.; Poppe, A.; Hofmann, K.; Rencz, M.; Glesner, M.; Szekely, V.
Reference:
European Design and Test Conference, 1996. ED&TC 96. Proceedings, Vol., Iss., 11-14 Mar 1996, Pages:528-532
Title:
A reduced-order model for electrically actuated microbeam-based MEMS
Author(s):
Younis, M.I.; Abdel-Rahman, E.M.; Nayfeh, A.
Reference:
Microelectromechanical Systems, Journal of, Vol.12, Iss.5, Oct. 2003, Pages: 672- 680
Title:
Cad And Foundries For Microsystems
Author(s):
Karaml, J.M.; Courtoisl, B.; Boutaminel, H.; Drake, P.; Poppe, A.; Szekely, V.; Rencz, M.; Hofmann, K.; Glesner, M.
Reference:
Design Automation Conference, 1997. Proceedings of the 34th, Vol., Iss., 9-13 Jun 1997, Pages:674-679
Title:
Generation of the HDL-A-model of a micromembrane from its finite-element-description
Author(s):
Hofmann, K.; Glesner, M.; Sebe, N.; Manolescu, A.; Marco, S.; Samitier, J.; Karam, J.-M.; Courtois, B.
Reference:
European Design and Test Conference, 1997. ED&TC 97. Proceedings, Vol., Iss., 17-20 Mar 1997, Pages:108-112
Title:
VHDL-A: a new language for modeling and simulation of heterogeneous systems
Author(s):
Glesner, M.; Hofmann, K.
Reference:
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International, Vol., Iss., 11-14 Oct 1995, Pages:37-46
Title:
A modeling approach to include mechanical microsystem components into the system simulation
Author(s):
Neul, R.; Becker, U.; Lorenz, G.; Schwarz, P.; Haase, J.; Wunsche, S.
Reference:
Design, Automation and Test in Europe, 1998., Proceedings, Vol., Iss., 23-26 Feb 1998, Pages:510-517
Title:
Behavioural modelling and simulation of a MEMS-based ultrasonic pulse-echo system
Author(s):
RUFER L., DOMINGUES CH., MIR S.
Reference:
Publ. in Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP'02), Cannes-Mandelieu, France, 6-8 May 2002 , [Publ. Year] 2002
Title:
Global modeling and simulation of system-on-Chip embedding MEMS devices
Author(s):
JUNEIDI Z., TORKI K., MARTINEZ S., NICOLESCU G., COURTOIS B., JERRAYA A. A.
Reference:
Publ. in 4th International Conference on ASIC, ASICON 2001, Beijing, China, October 23-25, 2001 , [Publ. Year] 2001
Title:
An extraction-based verification methodology for MEMS
Author(s):
Baidya, B.; Gupta, S.K.; Mukherjee, T.
Reference:
Microelectromechanical Systems, Journal of, Vol.11, Iss.1, Feb 2002, Pages:2-11
Title:
Electronically probed measurements of MEMS geometries
Author(s):
Gupta, R.K.;
Reference:
Microelectromechanical Systems, Journal of ,Volume: 9 , Issue: 3 , Sept. 2000, Pages:380 – 389
Title:
Accurate fully-coupled natural frequency shift of MEMS actuators due to voltage bias and other external forces
Author(s):
He, Y.; Marchetti, J.; Gallegos, C.; Maseeh, F.
Reference:
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on, Vol., Iss., 17-21 Jan 1999, Pages:321-325
Title:
A new FEM approach for field and torque simulation of electrostatic microactuators
Author(s):
Delfino, F.; Rossi, M
Reference:
Microelectromechanical Systems, Journal of, Vol.11, Iss.4, Aug 2002, Pages: 362- 371
Title:
Schematic-Based Lumped Parameterized Behavioral Modeling for Suspended MEMS
Author(s):
Q. Jing, T. Mukherjee and G. K. Fedder
Reference:
in Technical Digest of the ACM/IEEE International Conference on Computer Aided Design (ICCAD '02), pp. 367-373, November 10-14, 2002, San Jose, California.
Title:
Hierarchical Design & Test of MEMS
Author(s):
R. D. Blanton, G. K. Fedder and T. Mukherjee,
Reference:
MST News: International Newsletter on Microsystems and MEMS, pp. 28-31, vol. 1998, no. 1, March 1998.
Title:
High-Level Fault Modeling in Surface-Micromachined MEMS
Author(s):
N. Deb and R. D. (Shawn) Blanton,
Reference:
Journal of Analog Integrated Circuits and Signal Processing, Vol. 29, Issue 1/2, pp. 151-158, Oct. 2001.
Title:
A hierarchical circuit-level design methodology for microelectromechanical systems
Author(s):
Fedder, G.K.; Qi Jing
Reference:
Circuits and Systems II: Analog and Digital Signal Processing, IEEE Transactions on [see also Circuits and Systems II: Express Briefs, IEEE Transactions on], Vol.46, Iss.10, Oct 1999, Pages:1309-1315
Title:
Accuracy and Composability in NODAS
Author(s):
Gilbert C. Wong, Gerard K. Tse, Qi Jing, Tamal Mukherjee and Gary K. Fedder
Reference:
Carnegie Mellon University Proceedings of the 2003 IEEE/ACM Int. Workshop on Behavioral Modeling and Simulation (BMAS '03), pp. 82 - 87, October 7-8, 2003, San Jose, California
Title:
CMOS micromechanical bandpass filter design using a hierarchical MEMS circuit library
Author(s):
Q. Jing, H. Luo, T. Mukherjee, L. R. Carley, and G. K. Fedder
Reference:
in Proc. of IEEE Int’l Conf. on Microelectromechanical Systems, Miyazaki, Japan, Jan 23-27, 2000, p. 187-92
Title:
Challenges of MEMS device characterization in engineering development and final manufacturing
Author(s):
Maudie, T.; Miller, T.; Nielsen, R.; Wallace, D.; Ruehs, T.; Zehrbach, D.
Reference:
AUTOTESTCON '98. IEEE Systems Readiness Technology Conference., 1998 IEEE, Vol., Iss., 24-27 Aug 1998, Pages:164-170
Faults and defects in MNS
Title:
MEMS failure analysis and reliability
Author(s):
Samper, V.; Trigg, A.
Reference:
Physical and Failure Analysis of Integrated Circuits, 2003. IPFA 2003. Proceedings of the 10th International Symposium on the, Vol., Iss., 7-11 July 2003, Pages: 17- 24
Keyword :
Failure analysis and diagnosis
Title:
An Integrated Diagnostic Reconfiguration (IDR) Technique for Fault Tolerant Mixed Signal Microsystems
Author(s):
Erfaan Sharif, Tony Dorey & Andrew Richardson,
Reference:
Proceedings of IEEE International Circuits & Systems Symposium, Lisbon, pp1.413-1.416, 7-11th Sept. 98. ISBN : 0-7803-5008-1.
Keyword :
Failure analysis and diagnosis
Title:
A design and implementation methodology for micromachining
Author(s):
Tait, R.N.; Landsberger, L.M.; Currie, J.F.; McKinnon, G.H.; Parameswaran, M.; Robinson, A.M.; Gale, D.J.
Reference:
Electrical and Computer Engineering, 1996. Canadian Conference on, Vol.1, Iss., 26-29 May 1996, Pages:72-75 vol.1
Keyword :
Failure analysis and diagnosis
Title:
Particulate failures for surface-micromachined MEMS
Author(s):
Tao Jiang; Blanton, R.D.S.
Reference:
Test Conference, 1999. Proceedings. International, Vol., Iss., 1999, Pages:329-337
Keyword :
Failure analysis and diagnosis
Title:
Failure modes for stiction in surface-micromachined MEMS
Author(s):
Kolpekwar, A.; Blanton, R.D.; Woodilla, D.
Reference:
Test Conference, 1998. Proceedings. International, Vol., Iss., 18-23 Oct 1998, Pages:551-556
Keyword :
Failure analysis and diagnosis
Title:
Analysis of failure sources in surface-micromachined MEMS
Author(s):
Deb, N.; Blanton, R.D.
Reference:
Proceedings International Test Conference 2000, Pages: 739-749
Keyword :
Failure analysis and diagnosis
Title:
Failure Mechanisms in MEMS
Author(s):
Jeremy A.Walraven
Reference:
Test Conference, 2003. Proceedings. International, Vol., Iss., 2003, Pages:828-833
Keyword :
Failure analysis and diagnosis
Title:
Tools and Techniques for Failure Analysis and Qualification of MEMS
Author(s):
Jeremy A. Walraven
Reference:
Test Conference, 2003. Proceedings. International, Vol., Iss., 2003, Pages:834-842
Keyword :
Failure analysis and diagnosis
Title:
Future Challenges for MEMS Failure Analysis
Author(s):
Jeremy A. Walraven
Reference:
Test Conference, 2002. Proceedings. International, Vol., Iss., 2002, Pages:850-855
Keyword :
Failure analysis and diagnosis
Title:
A fault simulation methodology for MEMS
Author(s):
Rosing, R.; Richardson, A.M.; Dorey, A.P.
Reference:
Design, Automation and Test in Europe Conference and Exhibition 2000. Proceedings, Vol., Iss., 2000, Pages:476-483
Keyword :
Fault modeling
Title:
Building an analogue fault simulation tool and its application to MEMS
Author(s):
C. Roman, S. Mir and B. Charlot
Reference:
TIMA Laboratory, 46 Av. Félix Viallet, 38031, Grenoble, France
Keyword :
Fault modeling
Title:
Defect-oriented experiments in fault modelling and fault simulation of microsystem components
Author(s):
Vermeiren, W.; Straube, B.; Holubek, A.
Reference:
European Design and Test Conference, 1996. ED&TC 96. Proceedings, Vol., Iss., 11-14 Mar 1996, Pages:522-527
Keyword :
Fault modeling
Title:
MEMS fault model generation using CARAMEL
Author(s):
Kolpekwar, A.; Kellen, C.; Blanton, R.D.
Reference:
Test Conference, 1998. Proceedings. International, Vol., Iss., 18-23 Oct 1998, Pages:557-566
Keyword :
Fault modeling
Title:
CARAMEL: Contamination And Reliability Analysis of MicroElectromechanical Layout
Author(s):
Kolpekwar, A.; Jiang, T.; Blanton, R.D.
Reference:
Microelectromechanical Systems, Journal of, Vol.8, Iss.3, Sep 1999, Pages:309-318
Keyword :
Fault modeling
Title:
Development of a MEMS testing methodology
Author(s):
Kolpekwar, A.; Blanton, R.D.
Reference:
Test Conference, 1997. Proceedings., International, Vol., Iss., 1-6 Nov 1997, Pages:923-931
Keyword :
Fault modeling
Title:
Extending fault-based testing to microelectromechanical systems
Author(s):
Mir, S.; Charlot, B.; Courtois, B.
Reference:
Test Workshop 1999. Proceedings. European, Vol., Iss., 1999, Pages:64-68
Keyword :
Fault modeling
Title:
Generation of component level fault models for MEMS
Author(s):
Rosing, R. Reichenbach (Bosch), A. Richardson
Reference:
lseiver Microelectronics Journal, invited submission, Oct 2001
Keyword :
Fault modeling
Title:
Fault simulation of MEMS using HDLs
Author(s):
CHARLOT B., MIR S., COTA E.F., LUBASZEWSKI M., COURTOIS B.
Reference:
Publ. in SPIE Symposium on Design, Test and Microfabrication of MEMS/MOEMS, Paris, France, March-April 1999 , SPIE, [Publ. Year] 1999
Keyword :
Fault modeling
Title:
Extending fault-based testing to microelectromechanical systems
Author(s):
MIR S., CHARLOT B., COURTOIS B.
Reference:
Publ. in European Test Workshop (ETW'99), Constance, Germany, 25-28 May 1999 , [Publ. Year] 1999
Keyword :
Fault modeling
Title:
MEMS reliability in a vibration environment
Author(s):
Tanner, D.M.; Walraven, J.A.; Helgesen, K.S.; Irwin, L.W.; Gregory, D.L.; Stake, J.R.; Smith, N.F.
Reference:
Reliability Physics Symposium, 2000. Proceedings. 38th Annual 2000 IEEE International, Vol., Iss., 2000, Pages:139-145
Keyword :
Reability
Title:
RF MEMS reliability
Author(s):
DeNatale, J.; Mihailovich, R.
Reference:
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th Innational Conference on, 2003, Vol.2, Iss., June 9-12, 2003, Pages: 943- 946
Keyword :
Reability
Title:
Reliability test and failure analysis of optical MEMS
Author(s):
Durr, P.; Dauderstadt, U.; Kunze, D.; Auvert, M.; Lakner, H.
Reference:
Physical and Failure Analysis of Integrated Circuits, 2002. IPFA 2002. Proceedings of the 9th International Symposium on the, Vol., Iss., 2002, Pages: 201- 206
Keyword :
Reability
Title:
Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS
Author(s):
Jensen, B.D.; de Boer, M.P.; Masters, N.D.; Bitsie, F.; LaVan, D.A.
Reference:
Microelectromechanical Systems, Journal of, Vol.10, Iss.3, Sep 2001, Pages:336-346
Keyword :
Reability
Title:
Microscale materials testing using MEMS actuators
Author(s):
Haque, M.A.; Saif, M.T.A.
Reference:
Microelectromechanical Systems, Journal of, Vol.10, Iss.1, Mar 2001, Pages:146-152
Keyword :
Reability
Title:
Reliability of surface micromachined MicroElectroMechanical actuators
Author(s):
Tanner, D.M.
Reference:
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on, Vol.1, Iss., 2000, Pages:97-104 vol.1
Keyword :
Reliability
Title:
MEMS reliability in shock environments
Author(s):
Tanner, D.M.; Walraven, J.A.; Helgesen, K.; Irwin, L.W.; Brown, F.; Smith, N.F.; Masters, N.
Reference:
Reliability Physics Symposium, 2000. Proceedings. 38th Annual 2000 IEEE International, Vol., Iss., 2000, Pages:129-138
Keyword :
Reliability
Actuation and stimuli
Title:
CMOS-MEMS membrane for audio-frequency acoustic actuation
Author(s):
Neumann, J.J., Jr.; Gabriel, K.J.;
Reference:
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on , 21-25 Jan 2001, Pages:236 – 239
Keyword :
Acoustic actuation
Title:
Low-cost low actuation voltage copper RF MEMS switches
Author(s):
Balaraman, D.; Bhattacharya, S.K.; Ayazi, F.; Papapolymerou, J.
Reference:
Microwave Symposium Digest, 2002 IEEE MTT-S International, Vol.2, Iss., 2002, Pages:1225-1228
Keyword :
Electrical excitation of MNS
Title:
Measuring the deflection of a micromachined cantilever-in-cantilever device using a piezoresistive sensor
Author(s):
Yuan Ma; Robinson, A.M.; Lawson, R.P.W.; Bing Shen; Strembicke, D.; Allegretto, W.
Reference:
Electrical and Computer Engineering, 1999 IEEE Canadian Conference on, Vol.3, Iss., 1999, Pages:1632-1636 vol.3
Keyword :
Electrical excitation of MNS
Title:
Electrical testing for MEMS's piezoresistive pressure sensor
Author(s):
Zahria b. Abd Wahab, M.; Sauli, Z.b.; Ahmad, I.; b. Suradil, W.
Reference:
Sensors, 2003. AsiaSense 2003. Asian Conference on, Vol., Iss., 2003, Pages: 33- 35
Keyword :
Electrical excitation of MNS
Title:
Use of a Statistical Approach for Efficient Implementation of Oscillation-Based Test Strategy
Author(s):
CHAEHOI A. ; LATORRE L. ; AZAIS F. ; NOUET P.
Reference:
IMSTW'03: 9th IEEE International Mixed-Signal Testing Workshop , 2003, pp. 99-103
Keyword :
Electrical excitation of MNS
Title:
CMOS micromachined cantilever-in-cantilever devices with magnetic actuation
Author(s):
Shen, B.; Allegretto, W.; Hu, M.; Robinson, A.M.
Reference:
Electron Device Letters, IEEE, Vol.17, Iss.7, Jul 1996, Pages:372-374
Keyword :
Electro-mgnetic actuation
Title:
Dynamic response of a magnetically actuated micromachined cantilever with a Permalloy electroplated film
Author(s):
Yu, B.; Allegretto, W.; Robinson, A.M.
Reference:
Electrical and Computer Engineering, 1999 IEEE Canadian Conference on, Vol.3, Iss., 1999, Pages:1643-1647 vol.3
Keyword :
Electro-mgnetic actuation
Title:
Magnetically actuated CMOS micromachined cantilever-in-cantilever devices
Author(s):
Shen, B.; Robinson, A.M.; Allegretto, W.; Yuan Ma; Bing Yu; Ming Hu
Reference:
Electrical and Computer Engineering, 1996. Canadian Conference on, Vol.1, Iss., 26-29 May 1996, Pages:84-87 vol.1
Keyword :
Electro-mgnetic actuation
Title:
M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
Author(s):
Osterberg, P.M.; Senturia, S.D.
Reference:
Microelectromechanical Systems, Journal of, Vol.6, Iss.2, Jun 1997, Pages:107-118
Keyword :
Electrostatic actuation
Title:
Complete characterization of electrostatically-actuated beams including effects of multiple discontinuities and buckling
Author(s):
E. K. Chan, K. Garikipati, R. W. Dutton
Reference:
Modeling and Simulation of Microsystems (MSM), Puerto Rico, April 1999.
Keyword :
Electrostatic actuation
Title:
Introduction to Electrostatic Actuation for Optical MEMS
Author(s):
Thomas Bifano
Reference:
MN500 Design and Manufacture of Components for Optical Communication Feb 26, 2002
Keyword :
Electrostatic actuation
Title:
Comprehensive static characterization of vertical electrostatically actuated polysilicon beams
Author(s):
Chan, E.K.; Garikipati, K.; Dutton, R.W.;
Reference:
Design & Test of Computers, IEEE ,Volume: 16 , Issue: 4 , Oct.-Dec. 1999, Pages:58 – 65
Keyword :
Electrostatic actuation
Title:
A MEMS piggyback actuator for hard-disk drives
Author(s):
Toshiyoshi, H.; Mita, M.; Fujita, H.
Reference:
Microelectromechanical Systems, Journal of, Vol.11, Iss.6, Dec 2002, Pages: 648- 654
Keyword :
Electrostatic actuation
Title:
Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point
Author(s):
Nadal-Guardia, R.; Dehe, A.; Aigner, R.; Castaner, L.M.
Reference:
Microelectromechanical Systems, Journal of, Vol.11, Iss.3, Jun 2002, Pages:255-263
Keyword :
Electrostatic actuation
Title:
An electrostatic microactuator system for application in high-speed jets
Author(s):
Huang, C.; Christophorou, C.; Najafi, K.; Naguib, A.; Nagib, H.M.
Reference:
Microelectromechanical Systems, Journal of, Vol.11, Iss.3, Jun 2002, Pages:222-235
Keyword :
Electrostatic actuation
Title:
Fabrication of distributed electrostatic micro actuator (DEMA)
Author(s):
Minami, K.; Kawamura, S.; Esashi, M.
Reference:
Microelectromechanical Systems, Journal of, Vol.2, Iss.3, Sep 1993, Pages:121-127
Keyword :
Electrostatic actuation
Title:
Electrostatic micromechanical actuator with extended range of travel
Author(s):
Chan, E.K.; Dutton, R.W.;
Reference:
Microelectromechanical Systems, Journal of ,Volume: 9 , Issue: 3 , Sept. 2000, Pages:321 - 328
Keyword :
Electrostatic actuation
Miscellaneous
Title:
Synchronization of MEMS resonators and mechanical neurocomputing
Author(s):
Hoppensteadt, F.C.; Izhikevich, E.M.;
Reference:
Circuits and Systems I: Fundamental Theory and Applications, IEEE Transactions on [see also Circuits and Systems I: Regular Papers, IEEE Transactions on] ,Volume: 48 , Issue: 2 , Feb. 2001, Pages:133 – 138
Title:
ESPI solution for non-contacting MEMS-on-wafer testing,
Author(s):
Petra Aswendt, Claus-Dieter Schmidt, Dirk Zielke and Steffen Schubert
Reference:
Optics and Lasers in Engineering, Volume 40, Issues 5-6, November-December 2003, Pages 501-515
Title:
A small area in-situ MEMS test structure to measure fracture strength by electrostatic probing
Author(s):
Maarten P. de Boer*, Brian D. Jensen* and Fernando Bitsie**
Reference:
Paper in SPIE Proceedings, v. 3875, Materials and Device Characterization in Micromachining, Santa Clara, CA Sept. 1999
Title:
Integration technology for MEMS automotive sensors
Author(s):
Gogoi, B.P.; Mladenovic, D.
Reference:
IECON 02 [Industrial Electronics Society, IEEE 2002 28th Annual Conference of the], Vol.4, Iss., 5-8 Nov. 2002, Pages: 2712- 2717 vol.4
Title:
A micromachined piezoelectric tactile sensor for an endoscopic grasper-theory, fabrication and experiments
Author(s):
Dargahi, J.; Parameswaran, M.; Payandeh, S.;
Reference:
Microelectromechanical Systems, Journal of ,Volume: 9 , Issue: 3 , Sept. 2000, Pages:329 – 335
Title:
Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS]
Author(s):
Kapels, H.; Aigner, R.; Binder, J.
Reference:
Electron Devices, IEEE Transactions on, Vol.47, Iss.7, Jul 2000, Pages:1522-1528
Title:
Comparison of Bulk- and Surface- Micromachined Pressure Sensors
Author(s):
William P. Eaton*, James H. Smith*, David J. Monk†, Gary O’Brien†, and Todd F. Miller
Reference:
Published in: Micromachined Devices and Components, Proc SPIE, Vol 3514, p. 431
Title:
A CMOS-compatible, surface-micromachined pressure sensor for aqueous ultrasonic application
Author(s):
W.P. Eaton* and J.H. Smith
Reference:
SPIE Smart Structures, Feb. 1996.
Tutorial & review papers
Title:
Fault/Failure Tolerance Strategies for MEMS Modules
Author(s):
S.K. Tewksbury
Reference:
Title:
MEMS design, realisation and characterisation in an educational context.
Author(s):
Bruno Estibals , Jean-Yves Fourniols, Jean-Louis. Noullet and Augustin Martinez
Reference:
Title:
Modeling and Simulation for Microelectromechanical Systems (MEMS) and Integrated Microsystems
Author(s):
Reference: